Integrated dynamic simulation of a magnetic bearing stage for particle free manufacturing process

One of the benefits from active magnetic bearing stages is their multi-degrees-of-freedom motion. When it comes to manufacturing process for semiconductors and display panels, ultra-low contamination may be counted for the first and most important benefit from magnetic bearing stages. We present a new type magnetic bearing stage which is compatible for particle free environment. Since this magnetic bearing stage is designed to be wireless and completely floats in the air or in a vacuum chamber, it is a contamination free device. To properly operate this new type magnetic bearing stage, a full dynamic model has been built to specify its structural dynamics, dynamic motion, and control dynamics. From flexible multi-body simulation an appropriate control algorithm could be identified and implemented in a real system. In this paper, modelling and dynamic simulation result are presented and discussed.