Fabrication of 3D carbon structures based on C-MEMS technique (invited speaker)

Facile and low-cost strategies are devised for large-scale manufacturing of three-dimensional (3D) large surface area and high-aspect-ratio carbon structures using UV photolithography process along with pyrolysis process. Moreover, combined with self-assembly process, oxygen plasma etching process, film sputtering process, or electrochemically deposition process, various 3D large surface area carbon structures are obtained, including suspended glassy-like carbon microelectrodes, nanowrinkles integrated carbon microstructures, micro/nano dual-scale carbon array, etc. These large surface area carbon structures show great potentials in the fields of chemical and biological sensors, surface-enhanced Raman scattering, and energy storage devices such as micro-supercapacitors, micro-batteries and fuel cells. This paper provides an overview of our research on large-scale fabrication of 3D large surface area carbon structures.