DocumentCode
720837
Title
Study on influence of integrating sphere test position on measuring accuracy of optical parameters of LED chip
Author
Chen Tengfei ; Liu Qi ; Li Bin
Author_Institution
State Key Lab. of Digital Manuf. Equip. & Technol., Huazhong Univ. of Sci. & Technol., Wuhan, China
fYear
2015
fDate
15-16 March 2015
Firstpage
1
Lastpage
3
Abstract
The development of a system that evaluates optical parameters of light emitting diodes (LED) in a wafer is presented, equipped with an integrating sphere on a three-dimensional precision platform. The influence of integrating sphere´s (IS) position and height relative to LED chip on measuring accuracy is analyzed quantitatively. It was found that luminous flux variation was less than 0.5% within deviation and there was a 20% reduction with the relative height varying from 9cm to 11cm.
Keywords
light emitting diodes; measurement uncertainty; LED chip; integrating sphere test position; light emitting diodes; luminous flux variation; measuring accuracy; optical parameters; three-dimensional precision platform; Light emitting diodes; Semiconductor device measurement; Semiconductor device reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Technology International Conference (CSTIC), 2015 China
Conference_Location
Shanghai
ISSN
2158-2297
Type
conf
DOI
10.1109/CSTIC.2015.7153449
Filename
7153449
Link To Document