Development of a jet-generator and its application to angular rate sensor

In this paper, we present the experimental and numerical development of a millimeter scale device that produces four micro-jet flows comprising two perpendicular pair. In addition, we show numerically the ability to employ these micro-jets for MEMS based fluidic angular rate sensor. The jets were created in a closed fluidic network without a check valve, and they can freely deflect in a confined sensing chamber. This allows the application of these jets to a triple-axis angular rate sensor whose working principle relies on the deflection of a jet in a rotating frame. The triple-axis angular rate sensor can be designed with only four thermal sensing elements. Our work can also be adapted to help researchers quickly develop a prototype or to integrate an inertial sensing component in their own micro-fluidic, micro-bio, or lab-on-a-chip systems.