DocumentCode
721759
Title
Influence of Cu underlayer on the high-frequency magnetic properties of FeCoSiO thin films
Author
Lu, G. ; Miao, X. ; Cheng, W. ; Huang, X. ; Yang, L. ; Pan, L.
Author_Institution
Sch. of Opt. & Electron. Inf., Huazhong Univ. of Sci. & Technol., Wuhan, China
fYear
2015
fDate
11-15 May 2015
Firstpage
1
Lastpage
1
Abstract
A series of soft magnetic FeCoSiO films were fabricated on Si (100) substrates using Cu as underlayer by radio frequency magnetron sputtering. The influence of Cu underlayers on the dynamic magnetic properties of as-sputtered FeCoSiO thin films were studied in details.
Keywords
cobalt compounds; iron compounds; magnetic thin films; soft magnetic materials; sputter deposition; Cu underlayer; FeCoSiO; Si; Si (100) substrates; dynamic magnetic properties; high-frequency magnetic properties; radiofrequency magnetron sputtering; soft magnetic thin films; Damping; Magnetic films; Magnetic properties; Magnetic resonance; Magnetomechanical effects; Saturation magnetization;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference (INTERMAG), 2015 IEEE
Conference_Location
Beijing
Print_ISBN
978-1-4799-7321-7
Type
conf
DOI
10.1109/INTMAG.2015.7156980
Filename
7156980
Link To Document