Title :
Fabrication and characterization of Si-based bipolar transistor structures using low-temperature bonding
Author :
Shimizu, S. ; Nishida, S. ; Liang, J. ; Morimoto, M. ; Shigekawa, N.
Author_Institution :
Grad. Sch. of Eng., Osaka City Univ., Osaka, Japan
Abstract :
We applied the low-temperature bounding for fabricating base/collector junctions of Si-based bipolar transistor structures. The common-base current gain of fabricated bipolar transistors increased as the ambient temperature was raised up to 165°C, which suggests that the low-temperature bounding might be useful for fabricating high-performance heterojunction devices.
Keywords :
bipolar transistors; bonding processes; elemental semiconductors; silicon; Si; Si-based bipolar transistor structures; base-collector junctions; common-base current gain; low-temperature bonding; Bipolar transistors; Bonding; Heterojunctions; Resistance; Silicon; Temperature; Temperature measurement; Si bipolar transistors; common-base characteristics; low temperature bounding; surface-activated bounding;
Conference_Titel :
Future of Electron Devices, Kansai (IMFEDK), 2015 IEEE International Meeting for
Conference_Location :
Kyoto
Print_ISBN :
978-1-4799-8614-9
DOI :
10.1109/IMFEDK.2015.7158551