DocumentCode
723181
Title
A micro hemispherical glass shell resonator for online liquid density sensing of microfluidics
Author
Yuzhen Zhang ; Jiafeng Xu ; Yu Zou ; Bin Luo ; Jintang Shang ; Ching-Ping Wong
Author_Institution
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China
fYear
2015
fDate
26-29 May 2015
Firstpage
1676
Lastpage
1681
Abstract
Rapid on-line detection of liquid density is crucial in petroleum, pharmaceutical, food processing industry and chemical industries. In this article, we present a novel resonating liquid densitometer with a micro hemispherical glass shell suitable for integration with microfluidic systems. The fluid density is measured via the change in resonant frequency caused by an added mass of fluids. The densitometer was characterized with different liquid solutions. Experimental results are in reasonable agreement with the theory and show good linear behavior of the densitometer. Results by a finite element model of the hemispherical glass shell correspond well with the measured resonant frequency values. The densitometer would be potentially suitable for on-line detection of multiple liquid samples due to its simple structure, high performance, cost effectiveness and easy processing.
Keywords
densitometry; density measurement; finite element analysis; frequency measurement; glass; microcavities; microfabrication; microfluidics; micromechanical resonators; microsensors; chemical industry; finite element model; fluid density measurement; food processing industry; liquid density detection; microfluidic system; microhemispherical glass shell resonator; multiple liquid sample detection; online liquid density sensing; petroleum; pharmaceutical; resonant frequency measurement; resonating liquid densitometer; Density measurement; Glass; Liquids; Resonant frequency; Sensors; Sugar;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC) , 2015 IEEE 65th
Conference_Location
San Diego, CA
Type
conf
DOI
10.1109/ECTC.2015.7159822
Filename
7159822
Link To Document