Screen-printed free-standing piezoelectric devices using low temperature process

Author

Jamel, Nursabirah ; Almusallam, Ahmed ; Dibin Zhu ; Torah, Russel ; Kai Yang ; Tudor, John ; Beeby, Steve

Author_Institution

Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK

fYear

2015

fDate

27-30 April 2015

Firstpage

1

Lastpage

4

Abstract

This paper reports, the fabrication by screen-printing and characterization of different types of free-standing structures. The process is based upon sacrificial surface micromachining using a water-based removal method enabling the fabrication of free-standing structures. Diaphragms, cantilevers and encastre beam structures have been fabricated simultaneously on a single substrate, demonstrating the feasibility of mass production.

Keywords

cantilevers; diaphragms; low-temperature techniques; micromachining; piezoelectric devices; cantilevers beam structures; diaphragms beam structures; encastre beam structures; free-standing piezoelectric device; free-standing structures; low temperature process; sacrificial surface micromachining; screen-printing; water-based removal method; Fabrication; Fabrics; Measurement by laser beam; Printing; Substrates; Temperature sensors; Voltage measurement; cantilever; free-standing; low temperature process; piezoelectric; sacrificial technology; screen-printing;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on

Conference_Location

Montpellier

Print_ISBN

978-1-4799-8627-9

Type

conf

DOI

10.1109/DTIP.2015.7160968

Filename

7160968