Co-design of a MEMS-CMOS autonomous switched oscillator

Author

Torri, Guilherme Brondani ; Bienstman, Jan ; Rottenberg, Xavier ; Tilmans, Harrie A. C. ; Van Hoof, Chris ; Puers, Robert

Author_Institution

Imec, Leuven, Belgium

fYear

2015

fDate

27-30 April 2015

Firstpage

1

Lastpage

4

Abstract

This work presents the co-design and simulation of a self-excited MEMS-CMOS oscillator. The device consists of an electrostatic MEMS actuator, a DC source and a resistive circuit switched by the actuator´s displacement. The MEMS device is modeled after an existing device. A CMOS circuit is proposed for the displacement detection and the switching mechanism. The oscillator is capable of sustaining oscillations autonomously and exhibiting periodic and aperiodic behavior. The proposed oscillator can process electronic as well as nonelectronic information. The oscillator behavior is highly sensitive to stimuli which makes it a good candidate to be used as an enhanced sensor or in systems of coupled oscillators.

Keywords

CMOS integrated circuits; electrostatic actuators; oscillators; switching circuits; DC source; MEMS-CMOS autonomous switched oscillator codesign; aperiodic behavior; complementary metal oxide semiconductor; displacement detection; electrostatic MEMS actuator; microelectromechanical system; oscillator behavior; resistive circuit; self-excited MEMS-CMOS oscillator; switching mechanism; Electrodes; Integrated circuit modeling; Micromechanical devices; Oscillators; Semiconductor device modeling; Switches; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on

Conference_Location

Montpellier

Print_ISBN

978-1-4799-8627-9

Type

conf

DOI

10.1109/DTIP.2015.7160973

Filename

7160973