Title :
In-situ measurement of nanoparticle quantity in microchambers
Author :
Ender, Ferenc ; Vitez, Andras ; Sallai, Gabor ; Weiser, Diana ; Nemeth, Marton
Author_Institution :
Dept. of Electron Devices, Budapest Univ. of Technol. & Econ., Budapest, Hungary
Abstract :
A measurement setup and a novel method are presented for the in-situ measurement of the quantity of magnetic nanoparticles (MNPs), which form a dense layer in a microchamber. The layer is formed by 250 nm or 500 nm epoxy covered iron oxide particles. The measurement is based on the resonance frequency shift of an RLC circuit whereas a flat inductor coil integrated in a PDMS film acts as a sensor. The particle amount inside the chamber affects the inductivity therefore the resonance frequency is changed. The method also enables the on-line monitoring of the actual particle quantity in the chamber. Characterization measurements revealed that the storage capacity of the 1 μl chamber is 128 μg and it is independent on the particle size in the 250 nm to 500 nm size range.
Keywords :
RLC circuits; inductors; microfabrication; nanoparticles; PDMS; RLC circuit; inductor coil; iron oxide particles; magnetic nanoparticles; microchambers; on-line monitoring; resonance frequency; sensor; size 250 nm to 500 nm; Atmospheric measurements; Frequency measurement; Magnetic resonance; Nanoparticles; Particle measurements; Semiconductor device measurement; MNP; magnetic nanoparticle; nanoparticle concentration measurement; quantifization;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on
Conference_Location :
Montpellier
Print_ISBN :
978-1-4799-8627-9
DOI :
10.1109/DTIP.2015.7161000