Electromechanical coupling characteristics of MEMS micro cantilevers with applications

In this work, the electromechanical coupling behavior such as pull-in characteristics and dynamic responses of MEMS cantilevers has been investigated. In particular, this work addressed the three interrelated issues: first, The speed-energy- impact relationship of generalized electrostatic actuated MEMS by constructing a SIMULINK model, second, the pull-in voltage of micro cantilevers with the existence of both stress gradients and fringing effects was found, and finally, the development of command shaping approach for reducing the vibration or impact minimization of electrostatic actuation for enhancing the device longevity while maintaining the device performance. Throughout these three inter-related problems, it is possible to develop integrated dynamics for future applications whatever in performance enhancement or in improving the structural reliability of electrostatic actuated MEMS devices.