Piezoelectric actuator characteristics measurement based on harris corner location

In order to obtain the driving characteristics of piezoelectric actuators, in this paper, the initial position is got by Harris corner location method. Initial template matching region is obtained by criteria raster image sequence process corner matching. A modified sub-pixel image block matching method is used to measure the actual driving characteristics of piezoelectric actuators. Experimental results show that the algorithm of displacement measurement has high accuracy and good stability. Piezoelectric characteristic curves obtained in line are compared with the results of physical analysis and able to satisfy the requirements of high-precision measurements of nanomanipulation.