• DocumentCode
    725705
  • Title

    ESD protection diodes in optical interposer technology

  • Author

    Boschke, Roman ; Groeseneken, Guido ; Scholz, Mirko ; Shih-Hung Chen ; Hellings, Geert ; Verheyen, Peter ; Linten, Dimitri

  • Author_Institution
    Dept. ESAT, KU Leuven, Leuven, Belgium
  • fYear
    2015
  • fDate
    1-3 June 2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    The ESD robustness of planar Si and Ge diodes on Silicon-on-Insulator (SOI) optical interposer is studied by using TLP and vfTLP system. Although Ge diodes show a lower failure current, a superior clamping capability with a resistance lowering behavior, which is attributed to the intrinsic material properties of Ge, makes Ge diodes possess a promising potential for ESD protections.
  • Keywords
    electrostatic discharge; elemental semiconductors; germanium; semiconductor diodes; silicon; ESD protection diodes; SOI; optical interposer technology; silicon-on-insulator; vfTLP system; Current measurement; Electrostatic discharges; Implants; Junctions; Resistance; Silicon; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IC Design & Technology (ICICDT), 2015 International Conference on
  • Conference_Location
    Leuven
  • Type

    conf

  • DOI
    10.1109/ICICDT.2015.7165912
  • Filename
    7165912
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=725705