Title :
Temperature dependent characteristics of intrinsically switchable ferroelectric composite FBARs
Author :
Lee, Seungku ; Zolfagharloo Koohi, Milad ; Sis, Seyit Ahmet ; Lee, Victor ; Mortazawi, Amir
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
This paper presents temperature dependent characteristics of intrinsically switchable ferroelectric composite FBARs. Ba0.5Sr0.5TiO3 and Si are used to form a composite FBAR. Measurement results show that both series and parallel resonance frequencies decrease with the temperature. The temperature coefficient of frequency is approximately -35 ppm/°C. The variation of quality factor and electromechanical coupling coefficient is less than 6.5% and 6.2% above 20 V bias.
Keywords :
Q-factor; acoustic resonators; barium compounds; ferroelectric devices; silicon; strontium compounds; Ba0.5Sr0.5TiO3; FBAR; Si; electromechanical coupling coefficient; film bulk acoustic resonators; parallel resonance frequency; quality factor; series resonance frequency; switchable ferroelectric composite; temperature dependent characteristic; Film bulk acoustic resonators; Frequency measurement; Magnetic resonance; Resonator filters; Temperature measurement; Wireless communication; BST; composite FBAR; electrostriction; temperature coefficient of frequency (TCF);
Conference_Titel :
Microwave Symposium (IMS), 2015 IEEE MTT-S International
Conference_Location :
Phoenix, AZ
DOI :
10.1109/MWSYM.2015.7167036
