Microwave heater at 20 GHz for nanoliter scale digital microfluidics

This paper proposes an optimized microwave heater at 20 GHz for nanoliter scale liquid samples in digital microfluidics. The developed measurement setup allows translating of the reflection coefficient of the heater to the temperature change of the water droplet via the temperature dependency of the liquid permittivity, thus avoiding a contact-based temperature measurement. Measurements have been carried out on pure water samples of 500 nL at power levels of 20 and 23 dBm at the probe tips. The measured data agrees very well with multiphysics simulation data. Heating performance has been characterized and high temperature gradients of 30 deg. C per second have been measured.