40 GHz laminate power divider circuits using integrated resistors

Author

Arzola, J. ; Miller, C. ; Henderson, R.M.

Author_Institution

Univ. of Texas at Dallas, Richardson, TX, USA

fYear

2015

fDate

17-22 May 2015

Firstpage

1

Lastpage

3

Abstract

This paper describes the fabrication and performance of tantalum nitride resistors integrated in a multilayer substrate with FR4 and SU-8 resist. The SU-8 layer is used to minimize the surface roughness so that the integrated resistor metal can be patterned reliably. A 40 GHz equal split Wilkinson power divider is demonstrated and shows good isolation and return loss. In addition a five-section broadband divider is fabricated using resistor values ranging from 50 to 1000 Ω.

Keywords

laminates; microwave integrated circuits; multilayers; power dividers; resistors; resists; tantalum compounds; FR4 resist; SU-8 layer; SU-8 resist; TaN; equal split Wilkinson power divider; five-section broadband divider; frequency 40 GHz; integrated resistor metal; laminate power divider circuits; multilayer substrate; resistance 50 ohm to 1000 ohm; surface roughness; tantalum nitride resistors; Distance measurement; Europe; Frequency measurement; ISO; Probes; Radio frequency; Resistors; FR4; SU-8; Wilkinson power dividers; integrated resistors; laminates;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium (IMS), 2015 IEEE MTT-S International

Conference_Location

Phoenix, AZ

Type

conf

DOI

10.1109/MWSYM.2015.7167146

Filename

7167146