Title :
Atomic Force Microscope Control Using a Cantilever Model with Two Modes of Resonance
Author :
Radulescu, Iulia-Cristina ; Besancon, Gildas ; Voda, Alina ; Stefanoiu, Dan
Author_Institution :
Fac. of Autom. Control & Comput., ”Politeh.” Univ. of Bucharest, Bucharest, Romania
Abstract :
The atomic force microscope (AFM) is a nanometric device that can be controlled through the tip of its cantilever, which has never to make contact with the scanned surface. Within this paper, a method that combines two state estimators and PID control is investigated, by considering the AFM exhibits two resonant frequencies. The method performance is compared to other control methods that are addressed in the literature, but when taking into account the AFM is exhibiting one single mode of resonance. The simulations prove that our method has superior performance to the compared ones.
Keywords :
atomic force microscopy; state estimation; three-term control; AFM; PID control; atomic force microscope control; cantilever model; resonant frequencies; state estimators; Atomic force microscopy; Force; Mathematical model; Resonant frequency; Surface topography; AFM cantilever; PID control; multi mode; resonance frequency; state observer;
Conference_Titel :
Control Systems and Computer Science (CSCS), 2015 20th International Conference on
Conference_Location :
Bucharest
Print_ISBN :
978-1-4799-1779-2
DOI :
10.1109/CSCS.2015.91