Atomic Force Microscope Control Using a Cantilever Model with Two Modes of Resonance

Author

Radulescu, Iulia-Cristina ; Besancon, Gildas ; Voda, Alina ; Stefanoiu, Dan

Author_Institution

Fac. of Autom. Control & Comput., ”Politeh.” Univ. of Bucharest, Bucharest, Romania

fYear

2015

fDate

27-29 May 2015

Firstpage

127

Lastpage

132

Abstract

The atomic force microscope (AFM) is a nanometric device that can be controlled through the tip of its cantilever, which has never to make contact with the scanned surface. Within this paper, a method that combines two state estimators and PID control is investigated, by considering the AFM exhibits two resonant frequencies. The method performance is compared to other control methods that are addressed in the literature, but when taking into account the AFM is exhibiting one single mode of resonance. The simulations prove that our method has superior performance to the compared ones.

Keywords

atomic force microscopy; state estimation; three-term control; AFM; PID control; atomic force microscope control; cantilever model; resonant frequencies; state estimators; Atomic force microscopy; Force; Mathematical model; Resonant frequency; Surface topography; AFM cantilever; PID control; multi mode; resonance frequency; state observer;

fLanguage

English

Publisher

ieee

Conference_Titel

Control Systems and Computer Science (CSCS), 2015 20th International Conference on

Conference_Location

Bucharest

Print_ISBN

978-1-4799-1779-2

Type

conf

DOI

10.1109/CSCS.2015.91

Filename

7168419