Title :
A versatile analog front-end for sensors based on piezoresistive silicon nanowire detection
Author :
Leman, O. ; Nikas, A. ; Zhou, H. ; Lagos, J.L. ; Vinchhi, B.J. ; Hauer, J. ; Jourdan, G. ; Rey, P.
Author_Institution :
Fraunhofer Inst. for Integrated Circuits (IIS), Erlangen, Germany
Abstract :
We present the design and implementation of an analog front-end for smart-sensors and measurement results with prototypes of acceleration micro-sensors. The technology used for sensor manufacturing features silicon nanowires as strain gauges. The proposed system supports Kelvin contacts scheme and sensor bias duty-cycling. A fully-differential amplifier with a sensor-degenerated common-mode rejection scheme implements sensor bias and readout with current re-use. Experimental results for the fabricated analog-front-end show a -89 dB non-linearity, a dynamic-range higher than 73 dB over the 1 mHz to 500 Hz bandwidth taking into account for sensor noise, a 540 μA consumption and operation at 1.7 V supply.
Keywords :
acceleration measurement; differential amplifiers; elemental semiconductors; intelligent sensors; microsensors; nanosensors; nanowires; piezoresistive devices; readout electronics; silicon; strain gauges; strain measurement; strain sensors; Kelvin contact scheme; Si; acceleration microsensor; analog front-end; bandwidth 1 mHz to 500 Hz; current 540 muA; fully-differential amplifier; gain -89 dB; piezoresistive silicon nanowire detection; sensor bias duty-cycling; sensor-degenerated common-mode rejection scheme; smart-sensor; strain gauge; voltage 1.7 V; Accelerometers; Electrical resistance measurement; Noise; Resistance; Sensor phenomena and characterization; Silicon; CMOS; M&NEMS; MEMS; NEMS; analog front-end; low-power; piezoresistive; silicon nanowire; smart-sensor;
Conference_Titel :
Circuits and Systems (ISCAS), 2015 IEEE International Symposium on
Conference_Location :
Lisbon
DOI :
10.1109/ISCAS.2015.7168721
