Mn-doped PMN-PT thin films for electrocaloric applications

Author

Kleiner, A. ; Suchaneck, G. ; Eydam, A. ; Gerlach, G. ; Liu, L. ; Gunther, A. ; Neumann, N.

Author_Institution

Solid State Electron. Lab., Tech. Univ. Dresden, Dresden, Germany

fYear

2015

fDate

24-27 May 2015

Firstpage

200

Lastpage

202

Abstract

In this work, lead magnesium niobate-lead titanate (1-x)Pb(Mg_1/3Nb_2/3)O₃-xPbTiO₃ ((1-x)PMN-xPT) thin films with PT-fractions of 6.5 to 20% were fabricated on Pt(111)-coated Si wafers by multi-target reactive sputtering using four metallic targets (Pb, Mg, Nb, Ti). In order to increase the dielectric strength, co-doping with Mn was performed by co-sputtering of MnO targets. The electrocaloric temperature change ΔTEC was estimated using Maxwell´s relation. Additionally, the EC coefficient ΔT_EC/ΔE was evaluated by integrating the electric field dependence of the pyroelectric coefficient determined by a high-frequency laser intensity modulation method.

Keywords

dielectric thin films; doping; electric strength; lead compounds; manganese; pyroelectricity; sputter deposition; Maxwell relation; PMN-PbTiO₃:Mn; Pt(111)-coated Si wafers; Pt-Si; codoping; dielectric strength; electric field dependence; electrocaloric applications; electrocaloric coefficient; electrocaloric temperature change; high-frequency laser intensity modulation method; lead magnesium niobate-lead titanate thin films; metallic targets; multitarget reactive sputtering; pyroelectric coefficient; Films; Lead; Niobium; Silicon; Sputtering; Substrates; Temperature; PMN-PT; electrocaloric properties; multi-target reactive sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop (ISAF/ISIF/PFM), 2015 Joint IEEE International Symposium on the

Conference_Location

Singapore

Type

conf

DOI

10.1109/ISAF.2015.7172705

Filename

7172705