Title :
Reconfigurable mm-wave phase shifter based on high impedance surface with carbon nanotube membrane MEMS
Author :
Generalov, A.A. ; Lioubtchenko, D.V. ; Raisanen, A.V.
Author_Institution :
Dept. of Radio Sci. & Eng., Sch. of Electr. Eng., Aalto Univ., Espoo, Finland
Abstract :
A novel phase shifter based on high impedance surface (HIS) with carbon nanotube (CNT) membrane MEMS is proposed. The CNT MEMS HIS is integrated into a dielectric rod waveguide (DRW) so that the CNT membrane acts as a movable ground plane. We present a novel fabrication method of the phase shifter being significantly simpler than those previously used. The device performance is verified through numerical simulations that show a theoretical phase shift of 260° with a 7 volt bias applied. So far we have experimentally demonstrated a CNT membrane varactor, where the distance of the CNT membrane and metal patches changed from 2 μm to 0.4 μm with a 10 volt bias.
Keywords :
carbon nanotubes; dielectric waveguides; micromechanical devices; millimetre wave phase shifters; carbon nanotube membrane MEMS; dielectric rod waveguide; high impedance surface; movable ground plane; reconfigurable mm-wave phase shifter; voltage 10 V; voltage 7 V; Dielectrics; Electromagnetic waveguides; Fabrication; Impedance; Micromechanical devices; Reflection; Surface impedance; Carbon nanotube (CNT); Dielectric rod waveguide (DRW); High impedance surface (HIS); MEMS; Phase shifter;
Conference_Titel :
Millimeter Waves (GSMM), 2015 Global Symposium On
Conference_Location :
Montreal, QC
DOI :
10.1109/GSMM.2015.7175112
