An on-wafer Cu-based microcoaxial technology for wideband and low loss microwave and mm-wave applications

The detailed process flow and the characteristic of an advanced on-wave Cu-based microcoaxial technology are discussed in this paper. The microcoaxial technology can be used to build advanced passives for microwave and mm-wave application on any type of substrate. And as the high speed and high power transistors is available for CMOS technology recently, the microcoaxial technology also provides a good opportunity for the development of Si-based MMIC for wideband and low loss microwave and mm-wave applications.