Fabrication of indium tin oxide film with controllable surface morphology via oxygen participant electron-beam evaporation technique

Author

Yan Shen ; Qing Liu ; Zhiyuan Zuo ; Mingsheng Xu ; Huan Liu ; Ying Wang ; Xiangang Xu ; Kai Jiang ; Muqing Zhang ; Xiaobo Hu

Author_Institution

State Key Lab. of Crystal Mater., Shandong Univ., Jinan, China

fYear

2013

fDate

10-12 Nov. 2013

Firstpage

219

Lastpage

222

Abstract

The ITO film as the transparent conductive layer in gallium nitride based light emitting diodes (LEDs) can improve effectively current spreading and is widely applied. In this paper, ITO films with different morphologies have been obtained through different evaporation conditions. By adjusting oxygen flow in the process of evaporation, nanorod, cellular particle and grain cluster ITO structures had been obtained. Roughnesses of different ITO films were detected by AFM and the optical properties are analyzed by ultraviolet-visual spectrometer. The growth mechanisms of ITO films with different surface morphologies are also discussed.

Keywords

atomic force microscopy; indium compounds; nanofabrication; nanorods; semiconductor thin films; surface morphology; ultraviolet spectra; vacuum deposition; visible spectra; ITO; LED; cellular particle; gallium nitride; grain cluster; indium tin oxide film; light emitting diodes; nanorod; optical properties; oxygen participant electron-beam evaporation; surface morphologies; surface morphology; transparent conductive layer; ultraviolet-visual spectrometry; Indium tin oxide; Morphology; Optical films; Rough surfaces; Surface morphology; Surface roughness;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Lighting (ChinaSSL), 2013 10th China International Forum on

Conference_Location

Beijing

Print_ISBN

978-1-4799-2249-9

Type

conf

DOI

10.1109/SSLCHINA.2013.7177352

Filename

7177352