Sensitivity calibration and test of a 3D hall integrated sensor device with an external magnetic field source on a new ATE concept

The accuracy in making Magnetic Sensitivity measurements of an integrated three-dimension Hall sensor can in general be very challenging. Sensitivity measurements are typically performed using an integrated coil system, which allows the generation of a low strength magnetic field. When the required field strength is greater than a few hundreds microTesla an external magnetic field source is needed. A new Test Hardware concept is presented to allow the calibration and test over temperature of a 3D hall integrated device. Calibration is performed by a direct measurement of the Sensitivity pre-trim of the three X, Y and Z sensors. The new test hardware gives the possibility to generate a stable and homogenous magnetic field and allows the test of the magnetic performances for any part in the production environment.