Modification of the surface layer of metal materials under the combined influence of high intensity pulsed ion beam and magnetron sputtering

Author

Remnev, G.E. ; Lebedynskiy, A.M. ; Legostaev, V.N. ; Pavlov, S.K. ; Petrov, A.V. ; Smolyanskiy, E.V. ; Stepanov, A.V.

Author_Institution

Nat. Res. Tomsk Polytech. Univ., Tomsk, Russia

fYear

2015

fDate

24-28 May 2015

Firstpage

1

Lastpage

1

Abstract

The enhancement of metal and alloys operating characteristics can be achieved by high intensity pulsed ion beam treatment due to modification of the morphology and the structural phase state of the surface. It is possible to improve the functional properties of the tools by coating too. The combination of these methods in a single technological cycle allow us enhance the modification efficiency.

Keywords

adhesives; coatings; ion beam effects; plasma deposition; sputter deposition; surface morphology; surface states; surface treatment; titanium alloys; titanium compounds; tungsten compounds; TiN; WC; carbon ions; coating adhesiveness; electron volt energy 300 keV; functional properties; hard alloys; high intensity pulsed ion beam sputtering; hydrogen ions; ion current density; magnetron sputtering; metal materials; physical-mechanical properties; plasma chemical deposition; pulse duration; refractory titanium alloys; structural phase modification; surface layer modification; surface morphology; surface state; time 80 ns; titanium nitride coating; tungsten carbide; Coatings; Ion beams; Metals; Morphology; Sputtering; Surface morphology; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Sciences (ICOPS), 2015 IEEE International Conference on

Conference_Location

Antalya

Type

conf

DOI

10.1109/PLASMA.2015.7179531

Filename

7179531