Solid state battery manufacturing with thermionic vacuum ARC and RF sputtering

Author

Pat, Suat ; Ozen, Soner ; Senay, Volkan ; Korkmaz, Sadan ; Pat, Zerrin

Author_Institution

Eskisehir Osmangazi Univ., Eskisehir, Turkey

fYear

2015

fDate

24-28 May 2015

Firstpage

1

Lastpage

1

Abstract

Very thin rechargeable batteries of 200 nm thicknesses have been produced at Plasma science and technologies laboratory at Physics Department of Art and Science Faculty of Eskisehir Osmangazi University. Solid-state batteries were manufactured with thermionic vacuum arc and RF sputtering methods. These methods are based on plasma deposition systems. According to obtained results, these batteries can be able to endure more than ten thousand times and these batteries have seen no loss of charging capacity.

Keywords

plasma deposition; secondary cells; sputter deposition; vacuum arcs; Faculty of Eskisehir Osmangazi University; Physics Department of Art and Science; Plasma science and technologies laboratory; RF sputtering methods; anode materials; battery capacities; cathode materials; charging capacity; current collector materials; electrical automobiles; electrical communication device; electrical tools; plasma deposition systems; rechargeable battery production; rechargeable properties; size 200 nm; solid-state batteries; solid-state battery manufacturing; thermionic vacuum arc; very thin rechargeable batteries; Anodes; Batteries; Cathodes; Plasmas; Radio frequency; Sputtering; Vacuum arcs;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Sciences (ICOPS), 2015 IEEE International Conference on

Conference_Location

Antalya

Type

conf

DOI

10.1109/PLASMA.2015.7179535

Filename

7179535