Solid state battery manufacturing with thermionic vacuum ARC and RF sputtering

Very thin rechargeable batteries of 200 nm thicknesses have been produced at Plasma science and technologies laboratory at Physics Department of Art and Science Faculty of Eskisehir Osmangazi University. Solid-state batteries were manufactured with thermionic vacuum arc and RF sputtering methods. These methods are based on plasma deposition systems. According to obtained results, these batteries can be able to endure more than ten thousand times and these batteries have seen no loss of charging capacity.