Title :
An experimental and computational study of the interaction between the jet of an ICP torch and a cylidrical substrate
Author :
Boselli, Marco ; Colombo, Vittorio ; Fiorini, Massimo ; Ghedini, Emanuele ; Gherardi, Matteo ; Sanibondi, Paolo ; Stancampiano, Augusto ; Traldi, Enrico
Author_Institution :
Alma Mater Studiorum, Univ. di Bologna, Bologna, Italy
Abstract :
Summary form only given. Several industrial and research and development processes can possibly make use of Inductively Coupled Plasma (ICP) torches in the interaction with either a static or a rotating cylindrical substrate; like for high purity silica overcladding of preforms for optical fiber production, as well as in some calibration procedure for high precision measurement of physical properties of materials and, generally, in the frame of thermal treatment techniques, with or without chemical synthesis and deposition of materials. The investigation of thermo-fluid-dynamic phenomena in the downstream plasma region of interaction with the substrate is important in order to optimize these processes, also taking advantage of the many operating and geometric parameters intrinsic in the use of ICP plasmas. The interaction between cylindrical rods of different diameters (4, 8, 16 mm) and materials (stainless steel and quartz), placed at different distances (30 and 40 mm) from the exit region of an ICP torch operated in Ar at 13.56 MHz and 500 W at atmospheric pressure has been investigated using Schlieren Imaging (SI) with a Z-type setup; substrate temperature measurements have been obtained using infrared temperature sensors. Two different points of view of the same experimental set-up have been used for SI: one with the camera axis coaxial with the rod axis, while another one with the camera axis perpendicular to both rod and torch axis, as shown in Fig. 1. Hot-spot temperature on the surface of the substrate has been measured with infrared sensors (Optris LTCF1); results are compared with T distribution obtained with 3D simulation of the region where the substrate interacts with the impinging jet; axisymmetric 2D simulation of the volumetric region where plasma is generated has been used. Experimentally derived temperatures are also used to validate the simulation model and to “tune” it with the aim of choosing the best physical description of the- turbulent phenomena occurring downstream the torch. Future studies will concern the analysis of substrate under rotation and/or translation.
Keywords :
argon; infrared detectors; optical fibre cladding; plasma diagnostics; plasma jets; plasma materials processing; plasma simulation; plasma temperature; plasma torches; plasma turbulence; quartz; stainless steel; temperature sensors; 3D simulation; Ar; ICP plasmas; ICP torch; Schlieren Imaging; SiO2; T distribution; Z-type setup; atmospheric pressure; axisymmetric 2D simulation; calibration procedure; camera axis; chemical synthesis; cylindrical rods; distance 30 mm; distance 40 mm; downstream plasma region; frequency 13.56 MHz; geometric parameters; high purity silica overcladding; hot-spot temperature; impinging jet; inductively coupled plasma torches; infrared temperature sensor; material deposition; operating parameters; optical fiber production; power 500 W; pressure 1 atm; rod axis; rotating cylindrical substrate; simulation model; size 16 mm; size 4 mm; size 8 mm; static cylindrical substrate; substrate rotation; substrate temperature measurements; substrate translation; thermal treatment techniques; thermo-fluid-dynamic phenomena; torch axis; turbulent phenomena; volumetric region; Iterative closest point algorithm; Plasma measurements; Plasmas; Silicon; Substrates; Temperature measurement; Temperature sensors;
Conference_Titel :
Plasma Sciences (ICOPS), 2015 IEEE International Conference on
Conference_Location :
Antalya
DOI :
10.1109/PLASMA.2015.7179725