DocumentCode :
731237
Title :
Control of particles distribution functions by magnetic field in helicon plasma discharge
Author :
Huang, T. ; Jin, C. ; Yu, J. ; Zhuge, L. ; Wu, X.
Author_Institution :
Coll. of Phys., Optoelectron. & Energy, Soochow Univ., Suzhou, China
fYear :
2015
fDate :
24-28 May 2015
Firstpage :
1
Lastpage :
1
Abstract :
Summary form only given. A self-designed helicon wave plasma (HWP) source with an internal "right-hand" helical antenna driven by a 13.56MHz radio-frequency (RF) source is investigated for its possible use for processing wall material in future magnetic fusion devices. The plasma beam is ejected into a larger diffusion chamber, where the ion energy distribution and electron energy distribution are measured by commercial retarding field analyzer and Langmuir probe, respectively. Using three independent controlled electromagnets, we modify the DC magnetic field B, and study the effect of the magnetic field B on IEDF and EEDF with pressure (argon) from 0.1-1mTorr and RF power from 100-1000 W. The radial profiles of the plasma parameters: Te, ne, and Vp are also researched by RF compensated Langmuir probe. Also, the Langmuir probe and electrostatic quadrupole plasma analyser measurements provide a comparison with the retarding field analyzer data. Further analysis shows that the IEDF and EEDF can be effective modified by the varied magnetic field B.
Keywords :
Langmuir probes; argon; electron density; helical antennas; helicons; high-frequency discharges; plasma density; plasma temperature; plasma transport processes; Ar; DC magnetic field; EEDF; HWP; IEDF; Langmuir probe; commercial retarding field analyzer; diffusion chamber; electromagnets; electron density; electron energy distribution; electron temperature; electrostatic quadrupole plasma analyser; frequency 13.56 MHz; helicon plasma discharge; ion energy distribution; magnetic field; magnetic fusion devices; particles distribution functions; plasma beam; plasma parameter radial profiles; plasma potential; power 100 W to 1000 W; pressure 0.1 mtorr to 1 mtorr; radiofrequency source; right-hand helical antenna; self-designed helicon wave plasma; wall material processing; Magnetic field measurement; Magnetic fields; Optical devices; Optical materials; Plasmas; Probes; Radio frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Sciences (ICOPS), 2015 IEEE International Conference on
Conference_Location :
Antalya
Type :
conf
DOI :
10.1109/PLASMA.2015.7179735
Filename :
7179735
Link To Document :
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