The generation and characteristics of atmospheric pressure plasma jet array in argon

Summary form only given. Atmospheric pressure plasma jet(APPJ) typically cover only a few millimeters, which limit its processing area. Grouping many individual jets together to form a jet array is a good solution for meeting large surface treatment applications. In this paper, a honeycomb two-dimensional plasma jet array consisting of 7 jet units with needle-ring electrode-plate electrode structure is generated in argon. The discharge characteristics of the array are studied by means of voltage-current waveforms, lighting emission images and optical emission spectra. The influences of applied voltage on the discharge characteristic are investigated, and the discharge power, transported charges and active species such as OH and O at different applied voltage are calculated and compared. Results show that uniform, stable plasma with area to about 7cm² can be obtained with the array. When the applied voltage increases from 8.5kV to 9.5kV, the discharge power and the transported charges increase from 80.6W to 119.32Wand from 1492nC to 2112nC, respectively. With the increasing of applied voltage, the spectrum intensity of the main species such as Ar, OH, O, N₂ also increase.