The beam plasma produced by electron beam in dielectric cavity

Summary form only given. Electron-beam-produced plasma can be of particular interest because of its properties, which could be easily regulated by electron beam parameters¹. Despite the interest in beam plasma, there are no published papers devoted to the generation of electron beam-produced plasma inside the dielectric cavities at the pressures of several Pascal, although, the generation of such plasma inside the dielectric container looks attractive for plasma chemistry and sterilization². In the present work, the possibility of electron beam injection into the dielectric cavity (quartz tube) is demonstrated. The object of our study was the beam-produced plasma, which was generated inside a closed dielectric volume by injection of electron beam with energy of 2-8 keV at gas pressures 213 Pa. Electron beam was formed by fore-vacuum plasma electron source with hollow cathode³. It is shown that beam plasma parameters are different, when plasma is created inside the dielectric tube, or in case of absence of the tube. Longitudinally uniform plasma can be formed within a closed dielectric cavity by means of a forevacuum pressure plasma-cathode electron beam source with optimized beam energy and gas pressure. The measured plasma parameters inside the cavity indicate that such plasma is suitable for various applications.