Modelling of tridimensional plasma enhanced chemical vapor deosition reactor at 2.45GHz

Our study is about the modeling of tridimensional plasma enhanced chemical vapor deposition (PECVD) reactors at 2.45 GHz frequency operating in Argon, to understand the distribution of its electromagnetic field in tow cases in presence of plasma and in absence and the effect of the plasma on the electromagnetic distribution, the flow of the gas/plasma system, and the plasma-to-gas heat transfer. The aim of the modeling is to describe the gas/plasma system in terms of its field, velocity and energy, by coupling two calculation modules: electromagnetic, which solves Maxwell´s equations considering the permittivity of the different media, hydrodynamic, which solves the Navier-Stokes´ equations for the gas/plasma system by finite element method. The effect of micro wave excitation, frequency and gas flow is considerate in our study.