Title :
Lossy frequency selective surfaces for gas sensing using ZnO films
Author :
Pardue, Colin ; Swaminathan, Madhavan ; Balaguru, John Bosco
Author_Institution :
Interconnect & Packaging Center, Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
Zinc Oxide (ZnO) has emerged as an intriguing material for environmental gas sensing. While many applications of ZnO thin films for gas sensing have been used, this paper proposes a novel technique in which ZnO thin films are patterned to form a lossy frequency selective surface (FSS). When the resistance of the ZnO changes with exposure to gas, there is a change in the amplitude and resonant frequency of the lossy FSS. A small change in the resonant frequency results in approximately 10 dB of amplitude shift at the original resonant frequency.
Keywords :
II-VI semiconductors; frequency selective surfaces; gas sensors; thin film sensors; wide band gap semiconductors; zinc compounds; FSS; ZnO; environmental gas sensing; lossy frequency selective surface; patterning; thin film sensor; Decision support systems; Nanoscale devices;
Conference_Titel :
Nanoscale Architectures (NANOARCH), 2015 IEEE/ACM International Symposium on
Conference_Location :
Boston, MA
DOI :
10.1109/NANOARCH.2015.7180578