Functional MOEMS packaging with optical position feedback

Author

Tortschanoff, A. ; Baumgart, M. ; Lenzhofer, M.

Author_Institution

Carinthian Tech Res. AG, Villach, Austria

fYear

2015

fDate

21-25 June 2015

Firstpage

220

Lastpage

223

Abstract

This paper reports a novel integration concept of an optical position feedback and driver unit for MOEMS scanner mirrors. The optical feedback scheme is based on a quadrant diode with a central hole. A compact PCB-based module was realized, which combines all necessary electrical, optical and mechanical aspects using existing manufacturing technologies. These modules provide a functional MOEMS packaging, which can be realized within short time at a minimum cost.

Keywords

driver circuits; micro-optomechanical devices; micromirrors; optical feedback; optical scanners; printed circuits; semiconductor device packaging; MOEMS scanner mirrors; central hole; compact PCB-based module; driver unit; electrical aspect; functional MOEMS packaging; manufacturing technology; mechanical aspect; optical aspect; optical position feedback; quadrant diode; Adaptive optics; Integrated optics; Mirrors; Optical design; Optical feedback; Optical reflection; Optical sensors; Functional packaging; MEMS housing; MOEMS; Module; PCB; SiP; System-in-Package; position feedback; scanner;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7180901

Filename

7180901