Title :
A high-efficiency oil-to-water micro-channel mixer/extractor by surface modification with patterned multiple SAMs for flow-guide
Author :
Chen, C. ; Xu, P. ; Li, X.
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
Abstract :
A micro-channel passive mixer and oil-to-water extractor is proposed, where oleophobic/oleophilic `two-tone´ stripes are modified at surface by patterning multiple SAMs (self-assembled monolayers) with UV-light exposure through hollowed hard-mask. With the novel technique the grown oleophobic SAM of FAS-17 can be region-selectively removed and the oleophilic SAM of OTS can be re-grown there. This process-cycle can be repeated for patterning multiple SAMs at wafer-level. Oil chaotic-flow can be generated on the `two-tone´ stripes. The interface area of oil/water is enlarged and transverse flow is generated, and thus, high-efficiency oil-to-water mixing/extraction are achieved with the surface-directed 3D spiral flow.
Keywords :
chaos; microchannel flow; mixing; monolayers; oils; self-assembly; surface treatment; two-phase flow; water; FAS-17; OTS; UV-light exposure; flow-guide; high-efficiency oil-to-water microchannel mixer; hollowed hard-mask; interface area; microchannel passive mixer; multiple SAM patterning; oil chaotic-flow; oil-to-water extractor; oleophilic SAM; oleophilic two-tone stripes; oleophobic SAM; oleophobic two-tone stripes; self-assembled monolayer; surface modification; surface-directed 3D spiral flow; transverse flow; wafer-level; Fabrication; Gases; Mixers; Silicon; Surface cleaning; Three-dimensional displays; Oil-to-water extraction; chaotic mixing; region-selective surface modification; self-assembled monolayer (SAM); surface-directed flow;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180932
