Title :
Gas sensing material: Synergistic optimization among sensitivity, repeatability and response speed by quantitatively extracted kinetic & thermodynamic model parameters
Author :
Pengcheng Xu ; Shuanbao Guo ; Haitao Yu ; Xinxin Li
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
Abstract :
Based on resonant-cantilever adsorbing experiment, a set of key thermodynamic/kinetic parameters of gas sensing materials is quantitatively extracted for overall performance assessment among sensitivity, repeatability and speed. With the method, individual optimization for carrier-structure and sensing-group of organophosphate sensing material is achieved for sensing-performance synergistic improvement.
Keywords :
adsorption; cantilevers; gas sensors; organic compounds; thermodynamics; gas sensing material; organophosphate sensing material; repeatability; resonant-cantilever adsorbing experiment; sensitivity; speed; thermodynamic model parameters; Adsorption; Kinetic theory; Optimization; Sensitivity; Temperature sensors; Thermodynamics; Gas Sensing material; Hyper-branched polymer; Kinetic; Mesoporous silica; Thermodynamic;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180951