Miniature origami-like folded MEMS TIMU

In this paper, we report implementation of a folded MEMS concept, demonstrating a prototype of Timing and Inertial Measurement Unit (TIMU) in <; 50 mm³ volume. The approach is based on assembling high aspect-ratio single-axis sensors into a 3-D configuration, or folding it into a 3-D prismatic shape, like a silicon origami. The fabrication process permits a significant reduction in size preserving functionality without compromising sensor performance. Fabricated TIMU prototypes feature 3 toroidal ring gyroscopes, 3 accelerometers, and a resonator, thus allowing for miniature self-contained 6-DOF inertial and timing system. Initial characterization confirmed the potential of folded MEMS approach for implementation of low-noise inertial sensors, demonstrating VRW of 0.078 m/s/√h and bias instability of <;0.2 mg for accelerometers, ARW of 0.78°/√h, and bias instability of <;17°/√h for gyroscopes.