Title :
Piezoelectric micromachined ultrasonic transducer of flat membrane with boosted transmitting performance
Author :
Tao Wang ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
We report a new piezoelectric micromachined ultrasonic transducer (pMUT) with a perfectly flat membrane, i.e. zero-bending membrane, in this paper. Leveraging on the pressure difference between atmosphere and vacuum, the initial deflection of membrane is significantly suppressed to 0.005% only for the pMUT integrated with vacuum cavity. Transmitting sensitivity of the zero-bending pMUT is boosted to 450% of the reference pMUT with slightly non-zero initial deflection.
Keywords :
micromechanical devices; piezoelectric transducers; small electric machines; ultrasonic transducers; flat membrane; pMUT; piezoelectric micromachined ultrasonic transducer; vacuum cavity; zero-bending membrane; Aluminum nitride; Cavity resonators; Electrodes; III-V semiconductor materials; Residual stresses; Sensitivity; Ultrasonic transducers; Bio-medical; MEMS; Piezoelectric; Piezoelectric micromachined ultrasonic transducer (pMUT); Transmitting sensitivity; Ultrasound;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181011
