Vibrations rejection in gyroscopes based on piezoresistive nanogauges

The work discusses the effects of vibrations on the performance of rate gyroscopes in terms of Allan variance, and presents the results of vibrations rejection on a Z-axis gyroscope based on piezoresistive nano-gauge sensing elements. In a comparative analysis with a consumer off-the-shelf gyroscope, the proposed device shows a 10-fold better angle random walk (ARW) under no vibrations, and at least a 100-fold better Allan variance, when acquired under vibration amplitude of ±6 g (gravity units), at frequencies up to 10 kHz.