Title :
Characterization of electrothermal actuation with nanometer and microradian precision
Author :
Copeland, Craig R. ; McGray, Craig D. ; Geist, Jon ; Aksyuk, Vladimir A. ; Stavis, Samuel M.
Author_Institution :
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
The single motion cycles of an electrothermal actuator were measured with nanometer and microradian precision, using a recently introduced particle tracking method. The actuator linked two rigid bodies that translated and rotated. Stochastic input noise decoupled and coupled the two bodies within the play of the linkage, resulting in a nondeterministic output. The linkage was characterized using a simple model of the actuation mechanism, establishing a new approach to characterizing microelectromechanical systems (MEMS).
Keywords :
electric actuators; micromechanical devices; motion measurement; stochastic processes; MEMS; electrothermal actuation; microelectromechanical system; microradian precision; motion measurement; nanometer; nondeterministic output; particle tracking method; rigid body; stochastic input noise decoupling; Couplings; Fluctuations; Image resolution; Micromechanical devices; Motion measurement; Noise; Uncertainty; Electrothermal; MEMS; microelectromechanical; microscopy; nanoparticle; superresolution; systems; tracking;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181042
