Characterization of electrothermal actuation with nanometer and microradian precision

Author

Copeland, Craig R. ; McGray, Craig D. ; Geist, Jon ; Aksyuk, Vladimir A. ; Stavis, Samuel M.

Author_Institution

Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA

fYear

2015

fDate

21-25 June 2015

Firstpage

792

Lastpage

795

Abstract

The single motion cycles of an electrothermal actuator were measured with nanometer and microradian precision, using a recently introduced particle tracking method. The actuator linked two rigid bodies that translated and rotated. Stochastic input noise decoupled and coupled the two bodies within the play of the linkage, resulting in a nondeterministic output. The linkage was characterized using a simple model of the actuation mechanism, establishing a new approach to characterizing microelectromechanical systems (MEMS).

Keywords

electric actuators; micromechanical devices; motion measurement; stochastic processes; MEMS; electrothermal actuation; microelectromechanical system; microradian precision; motion measurement; nanometer; nondeterministic output; particle tracking method; rigid body; stochastic input noise decoupling; Couplings; Fluctuations; Image resolution; Micromechanical devices; Motion measurement; Noise; Uncertainty; Electrothermal; MEMS; microelectromechanical; microscopy; nanoparticle; superresolution; systems; tracking;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181042

Filename

7181042