Title :
Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications
Author :
Hatipoglu, Gokhan ; Tadigadapa, Srinivas
Author_Institution :
Dept. of Electr. Eng., Penn State Univ., University Park, PA, USA
Abstract :
This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing μOe magnetic fields. The device consists of ~7.5 μm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas® film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ~800 μ Oe.
Keywords :
bending; bulk acoustic wave devices; crystal resonators; magnetic field measurement; magnetic sensors; magnetic thin films; magnetostrictive devices; micromachining; micromechanical resonators; microsensors; thin film sensors; AT-cut quartz bulk acoustic wave plate-resonator; ME resonator; frequency 223 MHz; magnetic field sensing application; magnetometer; magnetostrictive Metglas film; magnetostrictively induced flexural bending; micromachined magnetoelectric resonator; micromachined plate resonator; plate resonator unimorph structure; size 500 nm; ultrathin micromachined quartz plate resonator; Amorphous magnetic materials; Magnetic fields; Magnetic resonance; Magnetic sensors; Magnetometers; Magnetostriction; Bulk Acoustic Wave Resonator; Magnetic Sensors; Magnetostriction; Metglas®; Plate Resonator; Quartz Resonator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181046
