Fluid-filled micro suction-controller array for handling objects

This paper reports fluid-filled flexible micro suction-controller array (MISCA) that can hold diverse shape of objects. MISCA is made of PDMS and each suction unit works independently. Key technical issue was gas permeability of PDMS, which decreases the suction pressure for handling. We overcome this problem by using ethylene glycol as working fluid. We confirmed that MISCA filled with ethylene glycol had the highest suction pressure, and successfully demonstrated that 100 mm²-area MISCA can pull up a 75 g object, or a grooved object held by partial contact of the suction array.