Biaxial vector-graphic scanning micromirror using radial magnetic field

This paper presents the design, fabrication, and measurement results of an electromagnetic biaxial vector-graphic scanning micromirror. Instead of utilizing locally distributed magnetic fields from multiple magnets, radial magnetic field from concentric magnet assembly and unique coil geometry have been used to realize independent scan along two perpendicular axes irrespective of operation frequency. Proposed actuation mechanism also enables the use of a compact non-hermetic polymer-based package due to large driving torque and simple structure without any gap-closing microstructures. The magnet assembly is placed under the micromirror die with passive alignment and gap control during assembly process. Mechanical half scan angle of 11.6° and 3.8° have been achieved at DC current of 250mA and 400mA for horizontal and vertical scans, respectively.