MEMS mirrors submerged in liquid for wide-angle scanning

Author

Xiaoyang Zhang ; Rui Zhang ; Koppal, Sanjeev ; Butler, Lisa ; Xiang Cheng ; Huikai Xie

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

fYear

2015

fDate

21-25 June 2015

Firstpage

847

Lastpage

850

Abstract

This paper reports an electrothermal MEMS scanning mirror working in liquid for the first time. By submerging the MEMS mirror into a mineral oil whose refractive index is 1.47, a wide-angle optical scan (>120°) was achieved at small driving voltage (<;10V), and the scan frequency reached up to 30 Hz. The wide angle was achieved because of the angular increase of the “Snell´s Window” effect and the large mechanical tilt angle (±18°) of the MEMS mirror as well. The power consumption is 9.9 mW/° when working in air and 11.7 mW/° in the mineral oil. This submerged optical scanner may enable many new applications of wide-angle optics.

Keywords

micromirrors; minerals; oils; power consumption; refractive index; Snell´s window effect; electrothermal MEMS scanning mirror; mechanical tilt angle; mineral oil; power consumption; refractive index; scan frequency; wide-angle scanning; Actuators; Laser beams; Liquids; Micromechanical devices; Minerals; Mirrors; Temperature measurement; MEMS mirror; electrothermal bimorph; large mechanical angle; mineral oil; submerge; wide-angle scanning;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181056

Filename

7181056