UV-light driven piezoelectric thin-film actuators

Author

Kurokawa, F. ; Oochi, Y. ; Sadanda, A. ; Tsujiura, Y. ; Hida, H. ; Kanno, I.

Author_Institution

Dept. of Mech. Eng., Kobe Univ., Kobe, Japan

fYear

2015

fDate

21-25 June 2015

Firstpage

973

Lastpage

976

Abstract

We fabricated UV-light driven micro-actuators utilizing epitaxial piezoelectric thin films. We prepared Pb(Zr,Ti)O₃ (PZT) epitaxial thin films on cantilever-shaped Pt/MgO substrates, and observed light-induced deformation. When the UV-LED light was irradiated to the surface of PZT thin film, the cantilever deflected due to the coupling of photovoltaic and piezoelectric properties. The deflection of the cantilever was proportionally increased with the UV-light intensity, while the time constant was less than 2 sec, which was much shorter than that of bulk ceramics. These results indicate that UV-light driven piezoelectric thin-film actuators will open a new avenue for remote controlled micro-actuators.

Keywords

lead compounds; magnesium compounds; microactuators; photoelectricity; piezoelectric actuators; platinum; PZT-Pt-MgO; UV light driven microactuators; UV light driven thin film actuators; cantilever shaped substrate; epitaxial thin films; light induced deformation; piezoelectric thin film actuators; Actuators; Epitaxial growth; Micromechanical devices; Photovoltaic systems; Radiation effects; Substrates; Epitaxial; Light-driven actuator; Photostrictive; Photovoltaic; Piezoelectric; Sputtering; Thin film;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181087

Filename

7181087