Title :
The effect of charge redistribution on limiting the kt2.Q product of piezoelectrically transduced resonators
Author :
Tabrizian, R. ; Rais-Zadeh, M.
Author_Institution :
Electr. Eng. & Comput. Sci, Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
In this paper, we introduce a new loss mechanism that can significantly limit the quality factor (Q) of piezoelectrically transduced resonators. We show that the electromagnetic energy dissipated in the anharmonic process of free charge redistribution on metallic electrodes placed on commonly used piezoelectric materials sets a limit for the resonator Q that is frequency independent and is much smaller than the Akheiser Q limit at frequencies less than 1 GHz. To validate this theory, the Q limit is formulated for extensional bulk acoustic modes with in-plane polarization and compared with published measured data, showing reasonable agreement.
Keywords :
Q-factor; crystal resonators; electrodes; electromagnetic wave polarisation; micromechanical resonators; piezoelectric materials; piezoelectric transducers; Akheiser Q limit; anharmonic process; bulk acoustic modes; electromagnetic energy; free charge redistribution; in-plane polarization; loss mechanism; metallic electrodes; piezoelectric materials; piezoelectrically transduced resonators; quality factor; Acoustics; Aluminum nitride; Electrodes; III-V semiconductor materials; Piezoelectric films; Vibrations; Energy dissipation; MEMS; micromechanical resonator; phonon loss; piezoelectric transduction; quality factor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181089