• DocumentCode
    731848
  • Title

    Selective transduction of wine-glass vibration mode using differential optomechanics

  • Author

    Storey, M.J. ; Bhat, A.K. ; Bhave, S.A.

  • Author_Institution
    OxideMEMS Lab., Cornell Univ., Ithaca, NY, USA
  • fYear
    2015
  • fDate
    21-25 June 2015
  • Firstpage
    1005
  • Lastpage
    1008
  • Abstract
    This paper demonstrates differential optomechanical transduction which selectively drives and senses the wine-glass vibration mode of a silicon resonator. Two waveguide arms are used for optomechanical sensing at the anti-nodes of the 22 MHz wine-glass mode and utilize a differential photo detector (PD) to measure the vibration. The differential sense scheme enhances the wine-glass signal by 5.4 dB while significantly attenuating the radial “common-mode” vibration at 96.2 MHz by 11 dB.
  • Keywords
    electrostatic actuators; microsensors; optical resonators; photodetectors; transducers; differential optomechanics; differential photodetector; frequency 22 MHz; frequency 96.2 MHz; optomechanical transduction; radial common mode vibration attenuation; selective transduction; silicon resonator; wine glass vibration mode; Couplings; Optical coupling; Optical ring resonators; Optical sensors; Optical waveguides; MEMS; Optomechanics; differential transduction; wine-glass mode;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
  • Conference_Location
    Anchorage, AK
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2015.7181095
  • Filename
    7181095