Title :
Selective transduction of wine-glass vibration mode using differential optomechanics
Author :
Storey, M.J. ; Bhat, A.K. ; Bhave, S.A.
Author_Institution :
OxideMEMS Lab., Cornell Univ., Ithaca, NY, USA
Abstract :
This paper demonstrates differential optomechanical transduction which selectively drives and senses the wine-glass vibration mode of a silicon resonator. Two waveguide arms are used for optomechanical sensing at the anti-nodes of the 22 MHz wine-glass mode and utilize a differential photo detector (PD) to measure the vibration. The differential sense scheme enhances the wine-glass signal by 5.4 dB while significantly attenuating the radial “common-mode” vibration at 96.2 MHz by 11 dB.
Keywords :
electrostatic actuators; microsensors; optical resonators; photodetectors; transducers; differential optomechanics; differential photodetector; frequency 22 MHz; frequency 96.2 MHz; optomechanical transduction; radial common mode vibration attenuation; selective transduction; silicon resonator; wine glass vibration mode; Couplings; Optical coupling; Optical ring resonators; Optical sensors; Optical waveguides; MEMS; Optomechanics; differential transduction; wine-glass mode;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181095