A vertical driven inertial micro-switch with dual spring to prolong holding time

Author

Chen, W. ; Yang, Z. ; Wang, Y. ; Ding, G. ; Wang, H. ; Zhao, X.

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Shanghai Jiao Tong Univ., Shanghai, China

fYear

2015

fDate

21-25 June 2015

Firstpage

1113

Lastpage

1116

Abstract

In this paper, a new model has been proposed for the design of inertial micro-switch. Compared with the traditional model consisted by movable-fixed electrode, the electrodes are designed as two movable springs. The dynamic response processes of electrodes can be controlled via the structure parameters. The simulation results indicated that the elastic contact can effectively prolong the holding time. The fabricated prototypes were tested by drop hammer system. The test results demonstrated that the holding time of improved inertial micro-switch much longer than the traditional designed one with the same threshold acceleration.

Keywords

dynamic response; electrodes; microswitches; drop hammer system; dynamic response processes; holding time; inertial microswitch; movable-fixed electrode; Acceleration; Accelerometers; Damping; Electric shock; Electrodes; Springs; Switches; MEMS; dual spring; dynamic response process; holding time; inertial micro-switch;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181122

Filename

7181122