Title :
Integrated CMOS MEMS liquid capacitive inclinometer
Author :
Yi Chiu ; Bo-Ting Chen ; Hao-Chao Hong
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
This paper reports a miniaturized CMOS MEMS capacitive inclinometer with dielectric liquid sensing medium in the reservoir on top of the CMOS substrate. A DFR/glass cap is bonded to the CMOS chip to form a reservoir for the sensing liquid. Rotating/tilting the sensor changes the electrode area covered by the liquid and leads to a change of capacitance. The packaged sensor had a dimension of 2.4×2.4×1.2 mm3. Experimental results obtained by the on-chip readout circuit showed the proposed inclinometer had a sensitivity of 0.48 mV/deg in the linear range between ±60°. With proper calibration, the linear range can be extended to ±90°.
Keywords :
CMOS integrated circuits; calibration; capacitance measurement; capacitive sensors; dielectric devices; dielectric liquids; electrodes; glass; integrated circuit bonding; integrated circuit design; integrated circuit packaging; microfabrication; microsensors; readout electronics; DFR-glass cap; bonding; calibration; dielectric liquid sensing; electrode; integrated CMOS MEMS liquid capacitive inclinometer; on-chip readout circuit; CMOS integrated circuits; Capacitance; Electrodes; Liquids; Micromechanical devices; Reservoirs; Sensors; CMOS MEMS; SU-8; dry-film resist (DFR); inclinometer; liquid; packaging;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181132
