DocumentCode
731895
Title
Accelerated lifetime and reliability testing of large-deflection piezoelectric microsystems
Author
Rudy, R.Q. ; Sanchez, L.M. ; Tellers, M. ; Polcawich, R.G.
Author_Institution
US Army Res. Lab., Adelphi, MD, USA
fYear
2015
fDate
21-25 June 2015
Firstpage
1315
Lastpage
1317
Abstract
This paper reports, for the first time, accelerated lifetime testing and reliability of large displacement piezoelectric micro-electromechanical systems (MEMS) over trillions of cycles. Electrical, mechanical, and piezoelectric properties of cantilevers have been monitored over time and the surface topology has been observed through scanning electron microscopy.
Keywords
cantilevers; life testing; micromechanical devices; scanning electron microscopy; MEMS; accelerated lifetime testing; cantilevers; electrical properties; large-deflection piezoelectric microsystems; mechanical properties; micro-electromechanical systems; piezoelectric properties; reliability testing; scanning electron microscopy; surface topology; Arrays; Micromechanical devices; Reliability; Resonant frequency; Scanning electron microscopy; Testing; MEMS; Piezoelectric; lifetime; reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location
Anchorage, AK
Type
conf
DOI
10.1109/TRANSDUCERS.2015.7181173
Filename
7181173
Link To Document