Specific heat capacity of ultra-thin atomic layer deposition nanobridges for microbolometers

Author

Eigenfeld, N.T. ; Gray, J.M. ; Gertsch, J.C. ; Skidmore, G.D. ; George, S.M. ; Bright, V.M.

Author_Institution

Mech. Eng., Univ. of Colorado Boulder, Boulder, CO, USA

fYear

2015

fDate

21-25 June 2015

Firstpage

1385

Lastpage

1388

Abstract

This paper presents the first reported specific heat capacity measurements of ultra-thin atomic layer deposited W/Al₂O₃ thin films. The thermal time constants of suspended ALD nanobridges were measured and a new model was derived to fit the data and extract the specific heat capacity. The accuracy of the new model was compared against a traditional model using finite element and analytical modeling. Application of these ultra-thin materials for microbolometer performance enhancement is discussed.

Keywords

aluminium compounds; atomic layer deposition; bolometers; finite element analysis; heat measurement; microsensors; specific heat; temperature sensors; thin film sensors; time measurement; tungsten; W-Al₂O₃; analytical modeling; finite element modeling; microbolometer; specific heat capacity measurement; suspended ALD nanobridge measurement; thermal time constant; thin film; ultra-thin atomic layer nanobridge; ultrathin material; Aluminum oxide; Atomic layer deposition; Atomic measurements; Heating; Mathematical model; Predictive models; Temperature measurement; Microbolometer; atomic layer deposition; specific heat capacity; thin film; tungsten;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181191

Filename

7181191