Specific heat capacity of ultra-thin atomic layer deposition nanobridges for microbolometers

This paper presents the first reported specific heat capacity measurements of ultra-thin atomic layer deposited W/Al₂O₃ thin films. The thermal time constants of suspended ALD nanobridges were measured and a new model was derived to fit the data and extract the specific heat capacity. The accuracy of the new model was compared against a traditional model using finite element and analytical modeling. Application of these ultra-thin materials for microbolometer performance enhancement is discussed.