DocumentCode :
731922
Title :
Porous silicon based infrared photonic-sensor for high sensitive heavy metal ion detection
Author :
Jian-Ren Lai ; Jen-Kuei Wu ; Minh-Hang Nguyen ; Fan-Gang Tseng
Author_Institution :
Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear :
2015
fDate :
21-25 June 2015
Firstpage :
1476
Lastpage :
1478
Abstract :
In this paper we report the development of an ultrasensitive photonic sensor based on nanoporous silicon (NPS) substrate for heavy metal ions detection in a FTIR reflection system. A one-dimensional photonic crystal with disturbed Bragg reflector (DBR) fabricated by successive electrochemical etchings (ECE) is employed to enhance the reflected IR signals [1] [2]. This well-defined NPS nanostructures will be red shifted due to the increase in the refractive index of the Fe3+ ion solution (1 mM). The Fe3+ with difference concentration due to difference spectrum shift, and the average sensitivity is 22.3cm-1/mM corresponding to a detection limit of 10.8 ppm.
Keywords :
Bragg gratings; Fourier transform infrared spectra; distributed Bragg reflectors; electrochemical sensors; light reflection; nanofabrication; nanophotonics; nanoporous materials; nanosensors; optical sensors; photonic crystals; red shift; refractive index; silicon; 1D photonic crystal; DBR; FTIR reflection system; NPS nanostructures; Si; disturbed Bragg reflector; electrochemical etchings; heavy metal ion detection; nanoporous silicon substrate; red shift; reflected IR signal enhancement; refractive index; spectrum shift; ultrasensitive photonic sensor; Current density; Etching; Indexes; Metals; Microcavities; Photonic crystals; Silicon; FTIR spectra; Porous silicon etching; heavy metal ion; photonic sensor;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
Type :
conf
DOI :
10.1109/TRANSDUCERS.2015.7181214
Filename :
7181214
Link To Document :
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